Planar Holding history starts with the
foundation of KBTEM in November 1962, a design office for
precision electronic engineering in Minsk. The main activity
was design, development and organization of production of
the equipment for photolithographic processes and assembly
operations in IC and other microelectronic devices
The first steps of KBTEM activities were concentrated to
form a highly skilled staff and to develop all necessary
infrastructure for building complex equipment, starting with
research and development, manufacture of prototypes up to
their commercial production, marketing and servicing of
supplied systems at the customer’s site.
Combination of precision mechanics, optics, electronics,
software, developement of manufacturing and R&D facilities
within the first years of activity allowed to develop and
provide electronic industry with the mask making equipment,
mask aligners, equipment for assembly of integrated circuits
(ICs) and hybrid ICs using thermocompression, ultrasonic,
electropulse methods of wire bonding.
In 1966 the first Photocomposition System (Pattern
Generator) was developed and in 1967 – an automated line for
assembly of transistors on carrier tape in plastic packages.
In 1971 Planar R&D and Manufacturing Corporation with KBTEM
headquarters company was established. Such large
machine-building factories as Ellar (Riga, Latvia), Evistor
(Vitebsk, Belarus), Eton (Novolukoml, Belarus) and some
other enterprises joined the corporation.
In 1973 Planar developed the first Wafer Stepper Model
EM-542 ahead of the competitors from other countries. And in
1977 we began commercial production of fully Automatic Wire
Bonders Model EM-542 and Automatic Probers Model EM-680 with
the use of 4-axis linear step motor.
Rapid growth of VLSI complexity, chip sizes and transition
to 5", 6" and 8" wafers predetermined the development in
1981 and commercial production of a new Wafer Stepper EM-584
Series which incorporated a new type linear step motor-based
multi-axes drive and new projecting lenses of Binar Series.
Planar has manufactured about 1,000 wafer steppers of
The R&Ds in laser pattern generators got their further
evolution. The use of new light sources (lasers, pulse
lamps), fast computers, modular linear step motor drives and
high resolution optics allowed to build a family of
efficient Laser Pattern Generators EM-559 in 1981, EM-5009A
in 1983 and Multi-Beam Laser Pattern Generator EM-5089 in
1984. In 1988 we started commercial production of large-area
pattern generators for TV masks and printed circuit boards.
In 1992 Planar started production of Wafer Steppers Model
EM-5084 on a new platform for 8" wafers with minimum feature
New developments of assembly equipment were aimed at the
enhancement of throughput and precision, full automation and
building of integrated automatic lines. Automatic Die
Bonders Model EM-4085, Wire Bonders Model EM-4060 (Au) and
EM-4020B (Al) built during 1981-2002 were based on
multi-axes modular linear step motors, pattern recognition
systems and high-speed microprocessors. More than 5,000
units of the above-mentioned models where produced in the
1980s. Development in 1995 of new basic models of Wire
Bonders EM-4260 (8 wires per second, Au) and EM-4280 (3
wires per second, Al) was a logical evolution of the
On 27 December 2013 of state scientific and production
association of precision engineering “Planar” was
reorganized into Planar JSC, that does functions of
managing company of scientific and production holding of
precision engineering “Planar” registered by the Ministry of
Economy of the Republic of Belarus on 24 December 2014 in
Holding registry of the Republic of Belarus.
Development of a wide range of microscopes, inspection and
measurement equipment for mask and wafer manufacturing,
medical equipment defines scientific and technical
capabilities of Planar. At present Planar successfully
conducts researches, development and production of its
traditional equipment. Dear visitor, you have an opportunity
to get acquainted with modern equipment and scientific
achievements. We will be pleased to be beneficial to you.