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Equipment for mask pattern generation and inspection

Multichannel laser generators

Pattern generators

Automatic mask inspection

Photomask inspection

Laser-based mask defect repair systems


Equipment for wafer pattern generation and inspection


Large-area steppers

Pattern generator for wafers

Mask Aligners

Inspection of wafers and substrates

Chip Preparation Equipment


Wafer Grinders

Dicing Saws

Die Control and Cassetting Systems

Assembly and Packaging Equipment, Laser Processing

Die Bonders

Wire Bonders

Wafer Bonders

IC Pretreatment Equipment

Laser Processing Equipment

Microscopy, Optical Components


Medical Equipment



Application: Wedges are intended for forming and measurement of small beam deflection angles.

Material optical glass, fused silica
Dimensions 10 - 200 mm
Dimensional tolerance +0/-0.1 mm
Angle tolerance 3 arc min or up to 5 arc sec on request
Surface flatness 1/4 λ= 632.8 nm
Surface quality 0.01-mm wide scratches of total length 2x over working aperture

Russian version
Planar Holding
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2003 Planar
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