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Equipment for mask pattern generation and inspection

Precision pattern generators

Special application pattern generator

Automatic mask inspection

Systems for inspection of work masks

Laser-based mask defect repair systems


Equipment for wafer pattern generation and inspection

Equipment for wafer projection imaging

Large-area steppers

Equipment for direct writing on wafers

Tools for proximity exposure and double-side lithography

Wafer inspection equipment

Chip Preparation Equipment


Wafer Grinders

Dicing Saws

Die Control and Cassetting Systems

Assembly and Packaging Equipment, Laser Processing

Die Bonders

Wire Bonders

Wafer Bonders

IC Pretreatment Equipment

Laser Processing Equipment


Microelectronics Microscopes

Material Science


Medical Equipment



Application: Wedges are intended for forming and measurement of small beam deflection angles.

Material optical glass, fused silica
Dimensions 10 - 200 mm
Dimensional tolerance +0/-0.1 mm
Angle tolerance 3 arc min or up to 5 arc sec on request
Surface flatness 1/4 λ= 632.8 nm
Surface quality 0.01-mm wide scratches of total length 2x over working aperture

Russian version
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