Main   Site Map   Contact   Feedback   Useful Links  
About Planar Products Services R&D Support


Equipment for mask pattern generation and inspection

Multichannel laser generators

Pattern generators

Automatic mask inspection

Photomask inspection

Laser-based mask defect repair systems

Photorepeaters

Equipment for wafer pattern generation and inspection

Steppers

Large-area steppers

Pattern generator for wafers

Mask Aligners

Inspection of wafers and substrates

Chip Preparation Equipment

Probers

Wafer Grinders

Dicing Saws

Die Control and Cassetting Systems

Assembly and Packaging Equipment, Laser Processing

Die Bonders

Wire Bonders

Wafer Bonders

IC Pretreatment Equipment

Laser Processing Equipment

Microscopy, Optical Components

Microscopes

Optical Components
Aspherical parts
Spherical parts
Prisms
Wedges
Parallel-sided parts
Microlens Raster Components
Vacuum chucks
Antireflection coatings
Mirrors
Beamsplitters
Photolithography method
Bend Reflaction

Medical Equipment

Cardiology

Reanimation and intensive care

Surgery and trauma

Physiotherapy, neurology

Molds, Linear Step Motors, Sensors

Molds

Linear Step Motors

Step Motors, Sensors

Vacuum Chucks


Application: the chucks are intended to fix accurately silicon, glass, ceramic wafers during processing. The high accuracy of glass surface processing ensures high flatness (planarity) of the wafers being processed.

Specifications

Material glass ceramic, optical glass, metal
Overall Dimensions 200 x 200 mm glass ceramic to 500 x 500 mm metal
Size Mesa Diameter 0.1 mm and more
Mesa Height 0.02 - 0.5 mm
Deviation of Flat LensTops from The Normal 0.15 mm for glass ceramic and glass (determined by surface preparation)

Russian version
PLANAR
Planar Corporation
Site Search
 
Select a model


Other models of this section

2003 Planar
e-mail: planar@solo.by

www.redgraphic.com Web design and
development