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Equipment for mask pattern generation and inspection

Precision pattern generators

Special application pattern generator

Automatic mask inspection

Systems for inspection of work masks

Laser-based mask defect repair systems


Equipment for wafer pattern generation and inspection

Equipment for wafer projection imaging

Large-area steppers

Equipment for direct writing on wafers

Tools for proximity exposure and double-side lithography

Wafer inspection equipment

Chip Preparation Equipment


Wafer Grinders

Dicing Saws

Die Control and Cassetting Systems

Assembly and Packaging Equipment, Laser Processing

Die Bonders

Wire Bonders

Wafer Bonders

IC Pretreatment Equipment

Laser Processing Equipment


Microelectronics Microscopes

Material Science


Medical Equipment


Spherical parts

English MainProductsMicroscopyOptical Components › Spherical parts

Spherical parts (lenses):

  • Plano-convex lenses
  • Plano-concave lenses
  • Bi-convex lenses
  • Bi-concave lenses
  • Convex-concave (meniscus lenses)
Material BK 7, quality optical glass, fused silica
Diameter 3÷500 mm
Center thickness 1÷60 mm
Diameter tolerance +0/-0.1 mm
Center thickness tolerance 0.1 mm
Surface accuracy ≤ 3 fringes (1,2λ) local error, 0.3 fringes (λ/8) at λ=632.8 nm
Surface quality 0.006-mm wide scratches of total length 2x over working aperture
Centration ≤ 3 arc min.
Chamfers 0÷0.6 mm @ 45o15o, typical
Working aperture ≥ 90% of diameter
Antireflection coating Single-layer MgF2 broadband, laser line
Working wavelength 210-2100 nm
Focus deviation at λ=632.8 nm 1%
Cleaning Non-abrasive method, acetone or isopropyl alcohol on lens tissue are recommended
Damage threshold AR coating: 100W/cm2 CW, 2 J/cm2 with 10 n/sec pulses

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