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Equipment for mask pattern generation and inspection

Multichannel laser generators

Pattern generators

Automatic mask inspection

Photomask inspection

Laser-based mask defect repair systems


Equipment for wafer pattern generation and inspection


Large-area steppers

Pattern generator for wafers

Mask Aligners

Inspection of wafers and substrates

Chip Preparation Equipment


Wafer Grinders

Dicing Saws

Die Control and Cassetting Systems

Assembly and Packaging Equipment, Laser Processing

Die Bonders

Wire Bonders

Wafer Bonders

IC Pretreatment Equipment

Laser Processing Equipment

Microscopy, Optical Components


Optical Components
Aspherical parts
Spherical parts
Parallel-sided parts
Microlens Raster Components
Vacuum chucks
Antireflection coatings
Photolithography method
Bend Reflaction

Medical Equipment


Reanimation and intensive care

Surgery and trauma

Physiotherapy, neurology

Molds, Linear Step Motors, Sensors


Linear Step Motors

Step Motors, Sensors

Spherical parts

Spherical parts (lenses):

  • Plano-convex lenses
  • Plano-concave lenses
  • Bi-convex lenses
  • Bi-concave lenses
  • Convex-concave (meniscus lenses)
Material BK 7, quality optical glass, fused silica
Diameter 3÷500 mm
Center thickness 1÷60 mm
Diameter tolerance +0/-0.1 mm
Center thickness tolerance 0.1 mm
Surface accuracy ≤ 3 fringes (1,2λ) local error, 0.3 fringes (λ/8) at λ=632.8 nm
Surface quality 0.006-mm wide scratches of total length 2x over working aperture
Centration ≤ 3 arc min.
Chamfers 0÷0.6 mm @ 45o15o, typical
Working aperture ≥ 90% of diameter
Antireflection coating Single-layer MgF2 broadband, laser line
Working wavelength 210-2100 nm
Focus deviation at λ=632.8 nm 1%
Cleaning Non-abrasive method, acetone or isopropyl alcohol on lens tissue are recommended
Damage threshold AR coating: 100W/cm2 CW, 2 J/cm2 with 10 n/sec pulses

Russian version
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