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Equipment for mask pattern generation and inspection

Multichannel laser generators

Pattern generators

Automatic mask inspection

Photomask inspection

Laser-based mask defect repair systems

Photorepeaters

Equipment for wafer pattern generation and inspection

Steppers

Large-area steppers

Pattern generator for wafers

Mask Aligners

Inspection of wafers and substrates

Chip Preparation Equipment

Probers

Wafer Grinders

Dicing Saws

Die Control and Cassetting Systems

Assembly and Packaging Equipment, Laser Processing

Die Bonders

Wire Bonders

Wafer Bonders

IC Pretreatment Equipment

Laser Processing Equipment

Microscopy, Optical Components

Microscopes

Optical Components
Aspherical parts
Spherical parts
Prisms
Wedges
Parallel-sided parts
Microlens Raster Components
Vacuum chucks
Antireflection coatings
Mirrors
Beamsplitters
Photolithography method
Bend Reflaction

Medical Equipment

Cardiology

Reanimation and intensive care

Surgery and trauma

Physiotherapy, neurology

Molds, Linear Step Motors, Sensors

Molds

Linear Step Motors

Step Motors, Sensors

Broadband Beamsplitters


Material BK 7, grade A, fine annealed optical glass UV grade fused silica
Surface Flatness Specification below at 632.8 nm over the clear aperture
Clear Aperture Central 80% of diameter
Surface Microroughness 36 ERMS, typical
Diameter Tolerance +0/-0.13mm
Thickness Tolerance 0.38 mm
Wedge 3015arc min
Chamfers 25.4mm: 0.250.76 mm face width x45 15
50.8  76.2 mm: 0.381.14 mm face width x4515
Surface S1 Uncoated, Fresnel reflection from uncoated substrate
Antireflection Coating, S2 Multilayer coating, Ravg < 0.75% at 45 over the specified wavelength range
Cleaning Non-abrasive method, acetone or isopropyl alcohol on lens tissue are recommended
Damage Threshold 500 W/cm2 CW, 0.5 J/cm2 with 10 nsec pulses
Material BK 7, grade A, fine annealed optical glass, UV grade fused silica
Surface Flatness Specification below at 632.8 nm over the clear aperture
Clear Aperture > central 80% of diameter
Surface Microroughness 3GERMS, typical
Diameter Tolerance +0/-0.13mm
Thickness Tolerance 0.38 mm
Wedge 3015arcmin
Chamfers 25.4 mm: 0.250.76 mm face width x45 15
50.8  76.2 mm: 0.381.14 mm face width x4515
Surface S1 Uncoated, Fresnel reflection from uncoated substrate
Antireflection Coating, S2 Multilayer coating, Ravg < 0.75% at 45 over the specified wavelength range
Cleaning Non-abrasive method, acetone or isopropyl alcohol on lens tissue are recommended
Damage Threshold 500 W/cm2 CW, 0.5 J/cm2 with 10 nsec pulses

Broadband Dielectric Beamsplitters

Material BK 7, grade A, fine annealed optical glass, UV grade fused silica
Surface Flatness Specification below at 632.8 nm over the clear aperture
Clear Aperture > central 80% of diameter
Surface Microroughness 3GERMS, typical
Diameter Tolerance +0/-0.13mm
Thickness Tolerance 0.38 mm
Wedge 3015arcmin
Chamfers 25.4 mm: 0.250.76 mm face width x45 15
50.8 76.2 mm: 0.381.14 mm face width x45 15
Beamsplitter Coating. S1 Rs=505%, Rp
Antireflection Coating, S2 Multilayer coating Ravg < 0.75% at 45 over the specified wavelength range
Cleaning Non-abrasive method, acetone or isopropyl alcohol on lens tissue are recommended
Damage Threshold 500 W/cm2 CW, 0.5 J/cm2 with 10 nsec pulses

Broadband Non-Polarizing Cube Beamsplitters

Material BK-7, grade A, fine annealed optical glass
Surface Flatness < 1/4 at 632.8 nm over the clear aperture
Clear Aperture Central diameter, > 80% of dimension
Surface Quality 40-20 scratch-dig
Transmission 45 5 %, independent of polarization
Reflection 45 5% independent of polarization
Polarization S- and P-polarization components matched to within 10%
Absorption < 10%
Transmitted Beam Deviation < 5 arc min
Reflected Beam Deviation 90 5 arc min
Angle of Incidence 05
Dimensions Tolerance 0.25 mm
Antireflection Coating Broadband, multilayer coating, R < 0.5% per surface
Temperature Range -50C to +90C
Orientation To avoid damage, beam should enter prism marked with a dot
Cleaning Non-abrasive method, acetone or isopropyi alcohol on lens tissue are recommended. Cemented optic, do not immerse in a solvent
Damage Threshold 100W/cm2 CW, 0.1 J/cm2 with 10 nsec pulses

Broadband Polarizing Cube Bbeamsplitters

Material SF 2, NSSK grade, precision annealed optical glass
Wavefront Distortion 1/4 at 632.8 nm over the clear aperture
Clear Aperture Central diameter, > 80% of dimension
Surface Quality 2010 scratch-dig
Efficiency p > 80%, > 90% average Rs > 99.5% average
Extinction Ratio Tp/ Ts > 500:1, 1000:1 average
Transmitted Beam Deviation < 5 arc min
Reflected Beam Deviation 905arc min
Angle of Incidence 05
Dimensions Tolerance 0.25 mm
Antireflection Coating Broadband, multilayer coating, Ravg< 1.0% per surface
Temperature Range -50C to +90C
Orientation To avoid damage, beam should enter prism marked with a dot
Cleaning Non-abrasive method, acetone or isopropyl alcohol on lens tissue are recommended. Cemented optic, do not immerse in a solvent
Damage Threshold 2 kW/cm2 CW, 1 J/cm2 with 10 nsec pulses
Pellicle Beamsplitters
Material 5 m thick polymer film membrane
Wavelength Range 375-2400 nm
Thickness Uniformity 0.06 fringes/mm
Temperature Range -40C to +70C
Durability Hygroscopic film, keep from high humidity
Cleaning Gently blow dust off only, do not touch or immerse membrane
Damage Threshold Uncoated: 2 W/ cm2 CW, 1 J/cm2 with 10 nsec pulses

High Energy Nd: YAG Laser Polarizing Cube Beamsplitters

Material BK-7, grade A, fine annealed optical glass
Wavefront Distortion < 1/4 at 632.8 nm over the clear aperture
Clear Aperture Central diameter, > 80% of dimension
Surface Quality 20 - 10 scratch-dig
Efficiency Tp>95%, Rs>99.5%
Extinction Ratio Tp/Ts > 200:1
Transmitted Beam Deviation < 5 arc min
Reflected Beam Deviation 905 arc min
Angle of Incidence 05
Dimensions Tolerance 0.25 mm
Antireflection Coating Multilayer V-coating, R < 0.25% per surface
Temperature Range -50C to +90C
Orientation Beam should enter prism marked with a don't
Cleaning Non-abrasive method, acetone or isopropyl alcohol on lens tissue are recommended
Damage Threshold 10 J/cm2 with 10 nsec pulses
Laser Line Non-Polarized Beamsplitters
Material BK 7, grade A, precision annealed optical glass
Wavefront Distortion 1 < 1/10 at 632.8 nm over the clear aperture
Clear Aperture > central 80% of diameter
Surface Quality 2010 scratch-dig
Diameter Tolerance 25.4+0/-0.13mm
Thickness 6.1 0.38 mm
Wedge 3015arcmin
Transmission 50 5%, independent of polarization
Reflection 50 5%, independent of polarization
Polarization S- and P-polarization components matched to within 5%
Absorption < 0.5%
Angle of Incidence 45 3
Antireflection Coating Multilayer coating, R < 0.5% per surface
Edges Fine ground and beveled
Temperature Range -50C to +90C
Cleaning Non-abrasive method, acetone or isopropyl alcohol on lens tissue are recommended
Orientation Beam should enter surface marked with an arrow
Damage Threshold 500 W/cm2 CW, 0.5 I/cm2 with 10 nsec pulses at 10 Hz
Laser Line Non-Polarized Cube Beamsplitters
Material BK 7, grade A, fine annealed optical glass
Wavefront Distortion ≤ 1/4 at 632.8 nm over the clear aperture
Clear Aperture Central diameter, > 80% of dimension
Surface Quality 2010 scratch-dig
Transmission 50 3%, independent of polarization
Reflection 50 3%. independent of polarization
Polarization S- and P-polarization components matched to within 3%
Transmitted Beam Deviation ≤ 5 arc min
Reflected Beam Deviation 9015arcmin
Angle of Incidence 02
Dimensions Tolerance 0.25 mm
Antireflection Coating Multilayer coating, R < 0.5% per surface
Temperature Range -50C to +90C
Orientation To avoid damage, beam should enter prism marked with a dot
Cleaning Non-abrasive method, acetone or isopropyl alcohol on lens tissue are recommended. Cemented optic, do not immerse in a solvent
Damage Threshold 2 kW/cm2 CW, 1 J/cm2 with 10 nsec pulses

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