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Functional Adjustment Equipment EM-6320


Functional Adjustment Equipment EM-6320 is intended for functional adjustment of electric parameters of integral circuits dice on semiconductor wafers with the size up to 200 mm. The system is designed for enterprises, producing microelectronic.

SPECIFICATIONS
Wafer diameter 100, 150, 200 mm
Positioning accuracy on X-Y 0.010 mm
Adjustment area 1010 mm
Laser spot size 5 mkm
Laser beam positioning accuracy 2 mkm
Heating table temperature from 50 to 150 º
Power requirements and consumption 230 V; 50 Hz; 3 kW
Overall dimensions 120010001500 mm
Weight 800 kg

Russian version
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