Main   Site Map   Contact   Feedback   Useful Links  
About Planar Products Services R&D Support


Equipment for mask pattern generation and inspection

Multichannel laser generators

Pattern generators

Automatic mask inspection

Photomask inspection

Laser-based mask defect repair systems

Photorepeaters

Equipment for wafer pattern generation and inspection

Steppers

Large-area steppers

Pattern generator for wafers

Mask Aligners

Inspection of wafers and substrates

Chip Preparation Equipment

Probers

Wafer Grinders

Dicing Saws

Die Control and Cassetting Systems

Assembly and Packaging Equipment, Laser Processing

Die Bonders

Wire Bonders

Wafer Bonders

IC Pretreatment Equipment

Laser Processing Equipment
EM-250K
EM-247
EM-290
EM-6320

Microscopy, Optical Components

Microscopes

Optical Components

Medical Equipment

Cardiology

Reanimation and intensive care

Surgery and trauma

Physiotherapy, neurology

Molds, Linear Step Motors, Sensors

Molds

Linear Step Motors

Step Motors, Sensors

Functional Adjustment Equipment EM-6320


 

Functional Adjustment Equipment EM-6320 is intended for functional adjustment of electric parameters of integral circuits dice on semiconductor wafers with the size up to 200 mm. The system is designed for enterprises, producing microelectronic.

Wafer diameter 100, 150, 200 mm
Positioning accuracy on X-Y 0.010 mm
Adjustment area 1010 mm
Laser spot size 5 mkm
Laser beam positioning accuracy 2 mkm
Heating table temperature from 50 to 150 º
Power requirements and consumption 230 V; 50 Hz; 3 kW
Overall dimensions 120010001500 mm
Weight 800 kg

Russian version
PLANAR
Planar Corporation
Site Search
 
Select a model


Other models of this section

2003 Planar
e-mail: planar@solo.by

www.redgraphic.com Web design and
development