Main   Site Map   Contact   Feedback   Useful Links  
About Planar Products Services Support

Equipment for mask pattern generation and inspection

Precision pattern generators

Special application pattern generator

Automatic mask inspection

Systems for inspection of work masks

Laser-based mask defect repair systems


Equipment for wafer pattern generation and inspection

Equipment for wafer projection imaging

Large-area steppers

Equipment for direct writing on wafers

Tools for proximity exposure and double-side lithography

Wafer inspection equipment

Chip Preparation Equipment


Wafer Grinders

Dicing Saws

Die Control and Cassetting Systems

Assembly and Packaging Equipment, Laser Processing

Die Bonders

Wire Bonders

Wafer Bonders

IC Pretreatment Equipment

Laser Processing Equipment


Microelectronics Microscopes

Material Science


Medical Equipment


Laser Processing Equipment EM-290

Laser Processing Equipment EM-290 is intended for drilling holes in dice made of piezoelectric quartz, lithium niobate, lithium tantalat, langasite, langatate, alumina ceramics without any changes in the die physical characteristics as well as for laser cutting of microsystem equipment wafers.
The system is designed for enterprises, producing microelectronics

Wafer thickness from 150 to 1000 mkm
Working area 150150 mm
Minimal diameter of the hole 0.1 mm
Repeatability of the hole lines position No more than 0.005 mm
For wafers from piezomaterials: difference between the inlet and outlet hole No mare than 5 %
Shear size, max No more than 4 %
Drilling time of the hole with diameter 100 mkm in pizoquartz wafer with thickness 0.5 mm No more than 30 s
Coordinate table travel accuracy on 150 mm 0.004 mm
Minimal travel discretion X, Y No more than 0.001 mm
Repeatability of coordinate table travel on X, Y No more than 0.004 mm
Power requirements and consumption 400V; 50Hz; 3kW
Overall dimensions 2360x1100x1500 mm
Weight 1980 kg

Russian version
Planar Holding
Site Search
Select a model

Other models of this section

2003 Planar
e-mail: Web design and