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Equipment for mask pattern generation and inspection

Multichannel laser generators

Pattern generators

Automatic mask inspection

Photomask inspection

Laser-based mask defect repair systems


Equipment for wafer pattern generation and inspection


Large-area steppers

Pattern generator for wafers

Mask Aligners

Inspection of wafers and substrates

Chip Preparation Equipment


Wafer Grinders

Dicing Saws

Die Control and Cassetting Systems

Assembly and Packaging Equipment, Laser Processing

Die Bonders

Wire Bonders

Wafer Bonders

IC Pretreatment Equipment

Laser Processing Equipment

Microscopy, Optical Components


Optical Components

Medical Equipment


Reanimation and intensive care

Surgery and trauma

Physiotherapy, neurology

Molds, Linear Step Motors, Sensors


Linear Step Motors

Step Motors, Sensors

Automatic Wire Bonder EM-4020PM



Automatic Wire Bonder EM-4020PM is a recent development project of the JSC “Planar-SO”, which is intended for connection bonding wires of aluminum to the contact platforms of the crystal and hull by overlapping ultrasonic welding.


The system is equipped with:

- modern control system with imported components;

-  modern software based on MS Windows operating system;

-  modern optical-TV system;

- high-speed vision system.


The system is provided with feedback on X, Y and Z actuators of the working movement’s system.

The system provides automatic supply on the cycle into the instrument’s welding zone in “satellites”, which are in the cassette-magazines.


Workspace X-Y, mm 100õ50
Diameter of the bonding wires, mm 0.020…0.070
Error of the wire’s bonding, mm ±0.005
The maximum number of installed wires, pieces unlimited
The compressive force of connected elements, Í 0.1…1.6 ± 10%
Determination of touch As part of the welding system
Drive of clamp, delivery and avulsion of wire electromagnetic
Duration of welding impulse, sec 0.001…0.255
Discontinuity of welding impulse’s definition, s 0.001
The output power of the ultrasonic generator (regulated), W min 4
Power supply and power consumption 230 Â, 50 Hz, max 1.2 kW
Overall dimensions, mm 1300õ800õ1600
Weight, kg max 400

Russian version
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