Main   Site Map   Contact   Feedback   Useful Links  
About Planar Products Services Support

Equipment for mask pattern generation and inspection

Precision pattern generators

Special application pattern generator

Automatic mask inspection

Systems for inspection of work masks

Laser-based mask defect repair systems


Equipment for wafer pattern generation and inspection

Equipment for wafer projection imaging

Large-area steppers

Equipment for direct writing on wafers

Tools for proximity exposure and double-side lithography

Wafer inspection equipment

Chip Preparation Equipment


Wafer Grinders

Dicing Saws

Die Control and Cassetting Systems

Assembly and Packaging Equipment, Laser Processing

Die Bonders

Wire Bonders

Wafer Bonders

IC Pretreatment Equipment

Laser Processing Equipment


Microelectronics Microscopes

Material Science


Medical Equipment


EM-2085B Wafer Dicing Saw

EM-2085B semiautomatic dicing saw is intended for cutting of semiautomatic wafers with the diameter up to 200 mm and the thickness up to 3 mm.

EM-2085B is based on the highly-precision systems, which provide the high accuracy of movements.

The semiautomatic dicing saws is equipped with feedback sensors on X, Y, Z drives; non-contact system for cutting depth control and dicing blade wearing, expanded processor memory, closed cutting zone, providing more reliable, simple and comfort work.

The semiautomatic dicing saw ensures the diagnostics of main functioning units with the output on LCD.

The diameter of the processed wafers 76, 100, 150, 200 mm
Power electrospindle 1,2 kW
Shaft speed electrospindle from 14000 to 60000 rpm
Max electrospindle movement on the Y axis 250 mm
The maximum displacement of the table object on the X axis 300 mm
The maximum displacement along the Z axis 24 mm
The range of adjustment of the working table feed object in the X from 0,1 to 400 mm/s
Control range indexing electrospindle Y-axis from 0,01 to 250 mm
Accumulated error indexing electrospindle Y axis over a length of 210 mm 0,004 mm
Reproducibility electrospindle movement along the Z axis to a length of 8 mm 0,005 mm
The volume flow of compressed air (at 0.5 MPa) 12 m3 / h
Compressed air pressure 0.5-0.6 MPa
Vacuum from 0,04 to 0,03 MPa
Overall dimensions 970x950x1400 mm

Russian version
Planar Holding
Site Search
Select a model

Other models of this section

2003 Planar
e-mail: Web design and