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Equipment for mask pattern generation and inspection

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EM-3047
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UN-1
UU-1

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UN-1 Protective Film Applicator


UN-1 Desktop Protective Film Applicator is designed for mechanical application of protection (adhesive film) on planar side of wafers. Bubble-free lamination of the adhesive film to the water is quaranteed.

SPECIFICATIONS
Wafer diameter 76, 100, 150, 200 mm
Throughput 35 wafer/hour
Power requirements, V/Hz ~ 230/50
Overall dimensions 480×850×320 mm
Weight 40 kg

Russian version
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