Main   Site Map   Contact   Feedback   Useful Links  
About Planar Products Services R&D Support

Equipment for mask pattern generation and inspection

Multichannel laser generators

Pattern generators

Automatic mask inspection

Photomask inspection

Laser-based mask defect repair systems


Equipment for wafer pattern generation and inspection


Large-area steppers

Pattern generator for wafers

Mask Aligners

Inspection of wafers and substrates

Chip Preparation Equipment

EM-6520, EM-6520-1
Probe Cards

Wafer Grinders

Dicing Saws

Die Control and Cassetting Systems

Assembly and Packaging Equipment, Laser Processing

Die Bonders

Wire Bonders

Wafer Bonders

IC Pretreatment Equipment

Laser Processing Equipment

Microscopy, Optical Components


Optical Components

Medical Equipment


Reanimation and intensive care

Surgery and trauma

Physiotherapy, neurology

Molds, Linear Step Motors, Sensors


Linear Step Motors

Step Motors, Sensors

EM-6520, EM-6520-1 Semiautomatic Probers

English MainProductsChip Preparation EquipmentProbers › EM-6520, EM-6520-1

EM-6520, E-6520-1 Semiautomatic Probers are designed for contacting of IC and VLSI on wafers with the diameter 200 mm in the range of normal and high temperatures.

The probes provide:

electrical contact between probes and contact pads of chips on wafer;

wafer tracing according to the traditional line by line  method and through the basic points programmed relatively to the basic die;

yield mapping of test results;

output of the test results on the display;

output of the test results on the periphery device;

die marking with ink.

The electronic devices and software ensure teaching from another device directly on the system, the parameters being saved in systems memory, for work under conditions of multinomenclate production.


Wafer dimeter, max 200 mm
Die size, max 2020 mm
Contact accuracy +-10 mkm
Object table heating temperature (E-6520) up to 150
Vacuum 0.04-0.03 MPa
Power consumption and requirements 230 V, 50 Hz, 0.8 W
Overall dimensions, max 8007001600 mm
Weight, max 300 kg

Russian version
Planar Corporation
Site Search
Select a model

Other models of this section

2003 Planar
e-mail: Web design and