EM-6290 Automatic Prober
EM-6290 automatic prober is intended to provide the contact between probes and IC contact pads.
The system provides for:
- automatic wafer load-unload;
- automatic programmable contacting;
- marking of chips with paint including chip-free areas along wafer perimeter;
- display output of inspection results.
Tools, supplied if ordered: Probe Cards.
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| Contact accuracy |
+- 5 mkm |
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| Wafer diameter, mm, max |
200 mm |
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| Computer vision system, including: |
there is |
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| Automatic die recognition |
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| Automatic wafer orientation |
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| Drive type |
LSM |
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| Working field |
460x220 mm |
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| Speed max |
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| X |
250 mm/s |
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| Y |
200 mm/s |
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| Vacuum |
0.5-0.6 MPa |
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| Power consumption |
230 V, 50 Hz, 0.8 kW |
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| Overall dimensions |
1230x1000x1500 mm |
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| Weight |
600 kg |
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