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Equipment for mask pattern generation and inspection

Multichannel laser generators

Pattern generators

Automatic mask inspection

Photomask inspection

Laser-based mask defect repair systems

Photorepeaters

Equipment for wafer pattern generation and inspection

Steppers

Large-area steppers

Pattern generator for wafers

Mask Aligners

Inspection of wafers and substrates

Chip Preparation Equipment

Probers
EM-6070
EM-6520, EM-6520-1
EM-6190A
EM-6290
Probe Cards

Wafer Grinders

Dicing Saws

Die Control and Cassetting Systems

Assembly and Packaging Equipment, Laser Processing

Die Bonders

Wire Bonders

Wafer Bonders

IC Pretreatment Equipment

Laser Processing Equipment

Microscopy, Optical Components

Microscopes

Optical Components

Medical Equipment

Cardiology

Reanimation and intensive care

Surgery and trauma

Physiotherapy, neurology

Molds, Linear Step Motors, Sensors

Molds

Linear Step Motors

Step Motors, Sensors

EM-6290 Automatic Prober


EM-6290 automatic prober is intended to provide the contact between probes and IC contact pads.

The system provides for:

- automatic wafer load-unload;

- automatic programmable contacting;

- marking of chips with paint including chip-free areas along wafer perimeter;

- display output of inspection results.

Tools, supplied if ordered: Probe Cards.

Contact accuracy +- 5 mkm
Wafer diameter, mm, max 200 mm
Computer vision system, including: there is
Automatic die recognition
Automatic wafer orientation
Drive type LSM
Working field 460x220 mm
Speed max
X 250 mm/s
Y 200 mm/s
Vacuum 0.5-0.6 MPa
Power consumption 230 V, 50 Hz, 0.8 kW
Overall dimensions 1230x1000x1500 mm
Weight 600 kg

Russian version
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