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Equipment for mask pattern generation and inspection

Precision pattern generators

Special application pattern generator

Automatic mask inspection

Systems for inspection of work masks

Laser-based mask defect repair systems


Equipment for wafer pattern generation and inspection

Equipment for wafer projection imaging

Large-area steppers

Equipment for direct writing on wafers

Tools for proximity exposure and double-side lithography

Wafer inspection equipment

Chip Preparation Equipment

EM-6520, EM-6520-1
Probe Cards

Wafer Grinders

Dicing Saws

Die Control and Cassetting Systems

Assembly and Packaging Equipment, Laser Processing

Die Bonders

Wire Bonders

Wafer Bonders

IC Pretreatment Equipment

Laser Processing Equipment


Microelectronics Microscopes

Material Science


Medical Equipment


EM-6290 Automatic Prober

EM-6290 automatic prober is intended to provide the contact between probes and IC contact pads.

The system provides for:
- automatic wafer load-unload;
- automatic programmable contacting;
- marking of chips with paint including chip-free areas along wafer perimeter;
- display output of inspection results.

Tools, supplied if ordered: Probe Cards.

Contact accuracy 5 mkm
Wafer diameter, mm, max 200 mm
Computer vision system, including:
Automatic die recognition +
Automatic wafer orientation +
Drive type LSM
Working field 450x210 mm
X speed max 250 mm/s
Y speed max 200 mm/s
Vacuum 0.5-0.6 MPa
Power consumption 230 V, 50 Hz, 0.8 kW
Overall dimensions 1230x1000x1500 mm
Weight 600 kg

Russian version
Planar Holding
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