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EM-6290 Automatic Prober

EM-6290 automatic prober is intended to provide the contact between probes and IC contact pads.
The system provides for: - automatic wafer load-unload; - automatic programmable contacting; - marking of chips with paint including chip-free areas along wafer perimeter; - display output of inspection results.
Tools, supplied if ordered: Probe Cards.
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SPECIFICATIONS |
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Contact accuracy |
±5 mkm |
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Wafer diameter, mm, max |
200 mm |
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Computer vision system, including: |
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Automatic die recognition |
+ |
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Automatic wafer orientation |
+ |
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Drive type |
LSM |
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Working field |
450x210 mm |
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X speed max |
250 mm/s |
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Y speed max |
200 mm/s |
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Vacuum |
0.5-0.6 MPa |
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Power consumption |
230 V, 50 Hz, 0.8 kW |
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Overall dimensions |
1230x1000x1500 mm |
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Weight |
600 kg |
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