Main   Site Map   Contact   Feedback   Useful Links  
About Planar Products Services R&D Support

Equipment for mask pattern generation and inspection

Multichannel laser generators

Pattern generators

Automatic mask inspection

Photomask inspection

Laser-based mask defect repair systems


Equipment for wafer pattern generation and inspection


Large-area steppers

Pattern generator for wafers

Mask Aligners

Inspection of wafers and substrates

Chip Preparation Equipment

EM-6520, EM-6520-1
Probe Cards

Wafer Grinders

Dicing Saws

Die Control and Cassetting Systems

Assembly and Packaging Equipment, Laser Processing

Die Bonders

Wire Bonders

Wafer Bonders

IC Pretreatment Equipment

Laser Processing Equipment

Microscopy, Optical Components


Optical Components

Medical Equipment


Reanimation and intensive care

Surgery and trauma

Physiotherapy, neurology

Molds, Linear Step Motors, Sensors


Linear Step Motors

Step Motors, Sensors

EM-6190A Prober

New generation -6190 Prober is intended to ensure electrical contact between probes and IC contact pads on wafers.

The system ensures:

- automatic orientation of the wafer;

- automatic contacting according to the present program;

- chip marking with paint, including chip free zones along the wafer perimeter;

   - output of wafer inspection results on display;

The system can be additionally equipped with a loader and the video pattern system.

Contact accuracy +- 10 mkm
Contact accuracy (using a video pattern system) +- 5 mkm
Wafer diameter, max 200 mm
Drive type LSM
Working area 460x220 mm
Speed max
X 250 mm/s
Y 200 mm/s
Power consumption 230 V, 50 Hz
Overall dimensions 800x800x1500 mm
Vacuum 0.5-0.6 MPa
Weight 500 kg

Russian version
Planar Corporation
Site Search
Select a model

Other models of this section

2003 Planar
e-mail: Web design and