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Equipment for mask pattern generation and inspection

Precision pattern generators

Special application pattern generator

Automatic mask inspection

Systems for inspection of work masks

Laser-based mask defect repair systems


Equipment for wafer pattern generation and inspection

Equipment for wafer projection imaging

Large-area steppers

Equipment for direct writing on wafers

Tools for proximity exposure and double-side lithography

Wafer inspection equipment

Chip Preparation Equipment

EM-6520, EM-6520-1
Probe Cards

Wafer Grinders

Dicing Saws

Die Control and Cassetting Systems

Assembly and Packaging Equipment, Laser Processing

Die Bonders

Wire Bonders

Wafer Bonders

IC Pretreatment Equipment

Laser Processing Equipment


Microelectronics Microscopes

Material Science


Medical Equipment


EM-6190A Prober

New generation -6190 Prober is intended to ensure electrical contact between probes and IC contact pads on wafers.

The system ensures:
- automatic orientation of the wafer;
- automatic contacting according to the present program;
- chip marking with paint, including chip free zones along the wafer perimeter;
- output of wafer inspection results on display.

The system can be additionally equipped with a loader and the video pattern system.

Contact accuracy 10 mkm
Contact accuracy (using a video pattern system) 5 mkm
Wafer diameter, max 200 mm
Drive type LSM
Working area 450x210 mm
X speed max 250 mm/s
Y speed max 200 mm/s
Power consumption 230 V, 50 Hz
Overall dimensions 800x800x1500 mm
Vacuum 0.5-0.6 MPa
Weight 500 kg

Russian version
Planar Holding
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