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Equipment for mask pattern generation and inspection

Precision pattern generators

Special application pattern generator

Automatic mask inspection

Systems for inspection of work masks

Laser-based mask defect repair systems

Photorepeaters

Equipment for wafer pattern generation and inspection

Equipment for wafer projection imaging

Large-area steppers

Equipment for direct writing on wafers

Tools for proximity exposure and double-side lithography

Wafer inspection equipment

Chip Preparation Equipment

Probers
EM-6070А
EM-6520, EM-6520-1
EM-6190A
EM-6290
Probe Cards

Wafer Grinders

Dicing Saws

Die Control and Cassetting Systems

Assembly and Packaging Equipment, Laser Processing

Die Bonders

Wire Bonders

Wafer Bonders

IC Pretreatment Equipment

Laser Processing Equipment

Microscopy

Microelectronics Microscopes

Material Science

Biology

Medical Equipment

Cardiology

Probers


EM-6070A

Manual Analytical Submicron Prober is designed to make electrical contact between measuring circuits and IC patterns, micron/submicron metallized buses, for visual inspection of structures as well as for isolation of some patterns during diagnostics of internal IC block condition under normal and higher temperatures

EM-6520, EM-6520-1

The semiautomatic EM-6520 probers are intended for finishing and interoperational control of LSI and VLSI on a wafer having a diameter of up to 200 mm

EM-6190A

EM-6190A automatic prober is designed to ensure electrical contact between probes and contact pads of ICs on the wafer

EM-6290

EM-6290 new generation Automatic Prober is intended to provide for contacting between probes and IC contact pads

Probe Cards

Probe Cards used in probing equipment are designed to ensure electrical contact between probes and contact pads of ICs and semiconductor devices on wafers.


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