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Equipment for mask pattern generation and inspection

Multichannel laser generators

Pattern generators

Automatic mask inspection

Photomask inspection

Laser-based mask defect repair systems

Photorepeaters

Equipment for wafer pattern generation and inspection

Steppers

Large-area steppers

Pattern generator for wafers

Mask Aligners

Inspection of wafers and substrates

Chip Preparation Equipment

Probers

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Dicing Saws

Die Control and Cassetting Systems

Assembly and Packaging Equipment, Laser Processing

Die Bonders

Wire Bonders

Wafer Bonders

IC Pretreatment Equipment

Laser Processing Equipment

Microscopy, Optical Components

Microscopes
MICRO 200-01, MICRO 200T-01
MI-1
MI-2
MK-1, MK-1T
MK-3, MK-3T
MK-AM

Optical Components

Medical Equipment

Cardiology

Reanimation and intensive care

Surgery and trauma

Physiotherapy, neurology

Molds, Linear Step Motors, Sensors

Molds

Linear Step Motors

Step Motors, Sensors

Microinspection station MK-3, MK-3T


The microinspection station is an inspection and measurement system based on the MI-1 microscope. It is intended for inspection and measurement of structure, composition and properties of metals and alloys in metallurgy and for input inspection of metals in mechanical engineering. The big potential of the optical train of the microscope permits to use it in chemical industry for evaluating the structure of different materials.
The MK-3 microinspection station is fitted out with the highest-rate optics with enlarged observation field. To provide the realization of any customer's requests Planar offers a wide range of options to the microscope which are supplied on a separate order.
Using of a quintuple electromechanical nosepiece allows studying objects without a considerable loss of time for searching the object after having changed the magnification (after changing the objective the sharpness remains practically unchanged and the object under study remains in the center of the field of vision). According to the customer's wish, the objects can be investigated in bright and dark fields and in polarization and differential interference contrast modes. The MK-3 microinspection station allows carrying out the TV inspection and the computer image analysis. The station's design is highly ergonomic. It allows adjusting the eye base and carrying out the dioptric adjustment for operator's eyesight in a broad range. The magnification change is made by an electromechanical drive. An option is envisaged for fine and coarse displacement of the object stage and for easy and convenient switching between the modes. All this makes the work at the microscope free from fatigue even during several hours.

Basic model specifications of the MI-1 microscope
Objectives (planapochromats) 5x 10x 20x 50x 100x
  numerical aperture 0.15 0.30 0.45 0.80 0.90
  objective working distance, mm 5.60 2.25 1.25 0.55 0.32
  resolution, lines/mm, no less than 400 750 1200 1800 2400
  visible magnification with 10x eye-piece:          
     with 1.0xbarrel lens 50 100 200 500 1000
     with 1.5xbarrel lens 75 150 400 750 1500
  linear field of vision, mm not less than          
     with 1.0x barrel lens 3.90 1.90 0.90 0.38 0.18
     with 1.5x barrel lens 2.60 1.27 0.60 0.25 0.15
 Nosepiece quintuple motorized
 Object stage manually controlled
 Stage travel along X, Y, mm , no less than 25x25
 Stage rotation along Z, deg 15
 Focussing value, mm, not less than 7
 Sensitivity of fine focussing, mm/revolution 0.08
 Power requirements ~ 230V, 50Hz / 200W
 Overall dimensions, mm (I-1/I-1) 750x350x420/750x350x490
 Weight, kg (I-1/I-1) 30/34

Russian version
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