Microinspection station MK-1, MK-1T
The microinspection station is an inspection and measuring system based on the MICRO 200-01 microscope. It is intended for inspection of semiconductor wafers and photomasks in production of various radio-electronic devices as well as for research in other fields of science and technology.
The MK-1 microinspection station is fitted out with the highest-rate optics with enlarged field of view. Using of a quintuple electromechanical nosepiece allows studying objects without a considerable loss of time for searching of the object after having changed the magnification (after changing of the objective the sharpness remains practically unchanged and the object under study remains in the center of the field of vision). The objects can be investigated in bright and dark fields and in polarization and differential interference contrast modes.
The station's design is highly ergonomic. It allows adjusting the tilt of the trinocular tube for operator's convenience, adjusting the eye base and carrying out the dioptric adjustment for operator's eyesight in a broad range. The magnification change is made through an electromechanical drive. An option is envisaged for fine and coarse accelerated displacement of the object stage and for easy switching between the modes. All this makes the work at the microscope not tiring.
The microinspection station allows carrying out the TV inspection in real time and the computer image analysis.
In accordance with customer's requests the microinspection station can be equipped either with a video camera or a digital photographic camera. Photographic/video adapters for the microinspection station can also be developed in accordance with photographic/video cameras available to the customer.
Instead of manual XY object stage an automated stage can be supplied together with control and movement devices.
To ensure the implementation of customer's requests PLANAR offers a large range of options to the microinspection station, which are custom-made.
Basic model specifications of the MICRO 200-01 microscope
|– numerical aperture
|– objective working distance, mm
|– magnification, x
|– linear field of view, mm, no less than
|– resolution, lines/mm, no less than
|Maximal magnification, x (with options)
|Stage travel along X, Y, mm, no less than
|Stage travel along Z, mm, no less than
|Sensitivity of fine focusing, mm/revolution
||~ 230V, 50Hz / 200W|
|Overall dimensions, mm