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Equipment for mask pattern generation and inspection

Precision pattern generators

Special application pattern generator

Automatic mask inspection

Systems for inspection of work masks

Laser-based mask defect repair systems


Equipment for wafer pattern generation and inspection

Equipment for wafer projection imaging

Large-area steppers

Equipment for direct writing on wafers

Tools for proximity exposure and double-side lithography

Wafer inspection equipment

Chip Preparation Equipment


Wafer Grinders

Dicing Saws

Die Control and Cassetting Systems

Assembly and Packaging Equipment, Laser Processing

Die Bonders

Wire Bonders

Wafer Bonders

IC Pretreatment Equipment

Laser Processing Equipment


Microelectronics Microscopes
MICRO 200-01, MICRO 200T-01
MK-1, MK-1T

Material Science


Medical Equipment


Microinspection station MK-1, MK-1T

The microinspection station is an inspection and measuring system based on the MICRO 200-01 microscope. It is intended for inspection of semiconductor wafers and photomasks in production of various radio-electronic devices as well as for research in other fields of science and technology.

The MK-1 microinspection station is fitted out with the highest-rate optics with enlarged field of view. Using of a quintuple electromechanical nosepiece allows studying objects without a considerable loss of time for searching of the object after having changed the magnification (after changing of the objective the sharpness remains practically unchanged and the object under study remains in the center of the field of vision). The objects can be investigated in bright and dark fields and in polarization and differential interference contrast modes.

The station's design is highly ergonomic. It allows adjusting the tilt of the trinocular tube for operator's convenience, adjusting the eye base and carrying out the dioptric adjustment for operator's eyesight in a broad range. The magnification change is made through an electromechanical drive. An option is envisaged for fine and coarse accelerated displacement of the object stage and for easy switching between the modes. All this makes the work at the microscope not tiring.

The microinspection station allows carrying out the TV inspection in real time and the computer image analysis.

In accordance with customer's requests the microinspection station can be equipped either with a video camera or a digital photographic camera. Photographic/video adapters for the microinspection station can also be developed in accordance with photographic/video cameras available to the customer.

Instead of manual XY object stage an automated stage can be supplied together with control and movement devices.

To ensure the implementation of customer's requests PLANAR offers a large range of options to the microinspection station, which are custom-made.

Basic model specifications of the MICRO200-01 microscope
Objectives (planapochromats) 5x 10x 20x 50x 100x
 numerical aperture 0.15 0.30 0.45 0.80 0.90
 objective working distance, mm 5.60 2.25 1.25 0.55 0.32
 magnification, x 50 100 200 500 1000
 linear field of view, mm, no less than 4.40 2.10 1.10 0.45 0.18
 resolution, lines/mm, no less than 400 750 1200 1800 2400
Maximal magnification, x (with options) 4500
Nosepiece quintuple motorized
Object stage manually controlled
Stage travel along X, Y, mm, no less than 200x200
Stage travel along Z, mm, no less than 27
Sensitivity of fine focusing, mm/revolution 0.05
Power requirements ~ 230V, 50Hz / 200W
Overall dimensions, mm 750x530x500
Weight, kg 45

Russian version
Planar Holding
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