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MICRO 200-01 and MICRO 200T-01 Microscopes

The microscopes are intended for inspection of semiconductor wafers and photomasks in production of various radioelectronic devices and also for research in other fields of science and technology. The microscope's design is highly ergonomic. It allows adjusting the tilt of the trinocular tube for operator's convenience, adjusting the eye base and to carry out dioptric adjustment for operator's eyesight in a broad range The magnification change is made through an electromechanical drive. An option is envisaged for fine and coarse accelerated displacement of the object stage and for easy switching between the modes. All this makes the work at the microscope not tiring.
Object observation modes: • bright and dark fields in reflected light (MICRO200-01); • bright field in reflected light, bright and dark fields in reflected light (MICRO200Ò-01); • polarization and differential-interference contrast.
Basic model specifications of the MICRO 200-01 microscope
Objectives (planapochromats) |
5x |
10x |
20x |
50x |
100x |
– numerical aperture |
0.15 |
0.30 |
0.45 |
0.80 |
0.90 |
– objective working distance, mm |
5.60 |
2.25 |
1.25 |
0.55 |
0.32 |
– magnification, x |
50 |
100 |
200 |
500 |
1000 |
– linear field of view, mm, no less than |
4.40 |
2.10 |
1.10 |
0.45 |
0.18 |
– resolution, lines/mm, no less than |
400 |
750 |
1200 |
1800 |
2400 |
Maximal magnification, x (with options) |
4500 |
Nosepiece |
quintuple motorized |
Object stage |
manually controlled |
Stage travel along X, Y, mm, no less than |
200x200 |
Stage travel along Z, mm, no less than |
27 |
Sensitivity of fine focusing, mm/revolution |
0.05 |
Power requirements |
~ 230V, 50Hz / 200W |
Overall dimensions, mm |
750x530x500 |
Weight, kg |
45 |
Options
Barrel lenses, X |
1,5; 2,0 |
Eyepieces, X |
10 ; 12,5 (with grid); 12,5; 15 |
Wafer holder, inch |
3...8 |
Mask holder, inch |
3...7 | |
A set of parts for polarization and DIC (Nomarsky) contrasts, TV- and photo-adapters. The following sets can be delivered on order: microscope-adapter-camera-PC (monitor)-software.
Binocular tube of the trinocular attachment is easily adjustable to the operator’s eye basis. The distance between the eyepieces is in the range of 55... 75 mm, angle 0...45 degr.
Scale factor on coarse stage travel knob is 0.5 mkm, enabling Z travel in the range of 0-27 mm. The sensitivity of coaxially positioned fine movement knob is 0.05 mm / revolution.
Quintuple motorized nosepiece for BF/DF objectives. Clockwise, counter-clockwise rotation with high positioning accuracy.
Object stage handle with fixation knob for fast coarse movement.
Selection of a required objective is performed from the control panel. The objectives can rotate from the control buttons clockwise or counter-clockwise.
The control panel also contains light indication of an objective in the working area and lamp illumination adjustment knob.
Objectives with longer working distances
Objectives (planapochromats) |
5x |
10x |
20x |
50x |
80x |
100x |
– numerical aperture |
0.10 |
0.17 |
0.38 |
0.50 |
0.65 |
0.70 |
– objective working distance, mm |
16.3 |
22.4 |
12.8 |
11.5 |
2.9 |
3.3 |
– magnification, x |
50 |
100 |
200 |
500 |
1000 |
– linear field of view, mm, no less than |
4.60 |
2.30 |
1.15 |
0.46 |
0.29 |
0.23 |
– resolution, lines/mm, no less than |
250 |
500 |
1100 |
1350 |
1800 |
1800 |
Base, mm |
45 |
Thread |
M27x0.75 |
Barrel lenses (1,5x and 2x) enhance total magnification of the microscope in 1.5 and 2 times, respectively
Eyepieces
Eyepieces |
Field of view(grid scale factor) |
10x, mm |
23 |
10x with grid 0.05 mm, mm |
23 |
12.5x, mm |
18 |
12.5x with grid 0.05 mm, mm |
18 |
15x, mm |
17 |
Polarization contrast kit is used for research of objects having anisotropy and together with Nomarsky prism – for DIC mode.
For microscope-based micro-inspection stations we offer various TV- and photo-adapters, video- and photo-cameras.

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