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Equipment for mask pattern generation and inspection

Precision pattern generators

Special application pattern generator

Automatic mask inspection

Systems for inspection of work masks

Laser-based mask defect repair systems

Photorepeaters

Equipment for wafer pattern generation and inspection

Equipment for wafer projection imaging

Large-area steppers

Equipment for direct writing on wafers

Tools for proximity exposure and double-side lithography

Wafer inspection equipment

Chip Preparation Equipment

Probers

Wafer Grinders

Dicing Saws

Die Control and Cassetting Systems

Assembly and Packaging Equipment, Laser Processing

Die Bonders

Wire Bonders

Wafer Bonders

IC Pretreatment Equipment

Laser Processing Equipment

Microscopy

Microelectronics Microscopes

Material Science

Biology

Medical Equipment

Cardiology

Linear Stepping Motors LR


Technical data of the motor
Number of phases 2; 4
Rated Current in phase winding, A 1.5; 3
Air pressure, MPa 0.30.05
Air gap, mkm 205
Angular step, angl. min 60* ; 45*
Intrastep hysteresis, angl. min 0.7
Repeatability accuracy, angl. min 0.5

*) according to customer's requirements

Overall dimensions* and synchronising moment
MODEL A, mm D, mm H, mm h, mm
d, mm
Ms, Nm
LR-2-1.5-2 / 100 124 100 28 10
22
2
LR-6-1.5-2 / 156 174 156 37 15
22
5.5
LR-8-1.5-2 / 204 222 204 37 15
22
12
LR-10-1.5-2 / 10" - 6" 295 254 37 18
152.4
10
LR-28-1.5-2 / 14"-10" 316 356 45 18
254
28
LR-27-1.5-2 / 449-355 475 449 56 23
355
27
Connectors: D-SUB-9 Steckers
Possible fields of applications
  • Coiling machines;
  • Manipulators;
  • Robotic systems;
  • Fiber-optic technology;
  • High precision multicoordinate systems.

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