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Equipment for mask pattern generation and inspection

Precision pattern generators

Special application pattern generator

Automatic mask inspection

Systems for inspection of work masks

Laser-based mask defect repair systems


Equipment for wafer pattern generation and inspection

Equipment for wafer projection imaging

Large-area steppers

Equipment for direct writing on wafers

Tools for proximity exposure and double-side lithography

Wafer inspection equipment

Chip Preparation Equipment


Wafer Grinders

Dicing Saws

Die Control and Cassetting Systems

Assembly and Packaging Equipment, Laser Processing

Die Bonders

Wire Bonders

Wafer Bonders

IC Pretreatment Equipment

Laser Processing Equipment


Microelectronics Microscopes

Material Science


Medical Equipment


Linear Stepping Motors LO

Technical data of the motor
Number of phases 2
Rated Current in phase winding, A 1.5; 3
Bearning type ball
Tooth pitch, mm 0.64*; 1.0*; 1.064*
Static synchronising force, N 25 ... 50
Max inductor speed, m/sec 1

Max inductor acceleration, m/sec2


Intrastep hysteresis, mkm 10
Repeatability, mkm 3
Cyclic error, mkm 25
Full step error, not more than 5 %

*) according to customer's requirements

Overall dimensions* and synchronising force
MODEL A, mm B, mm L**, mm FS, N
LOP-60-340- 28 - 60 340 -
LOP-90-340- 28 - 90 340 -
LOF-25-1.5-2-BB / 70 70 - - 25
LOF-36-1.5-2-BB / 85 85 - - 36
LOF-50-1.5-2-BB / 94 94 - - 50

**) the platen(stator) lenght can be increased by a successive connection of separate modules

Connectors: D-SUB-9 Steckers
Possible fields of applications
  • Transportation systems;
  • Manipulators;
  • Robotic systems;
  • Laser technology equipment;
  • High precision multicoordinate systems

Russian version
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