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Equipment for mask pattern generation and inspection

Multichannel laser generators

Pattern generators

Automatic mask inspection

Photomask inspection

Laser-based mask defect repair systems

Photorepeaters

Equipment for wafer pattern generation and inspection

Steppers

Large-area steppers

Pattern generator for wafers

Mask Aligners

Inspection of wafers and substrates

Chip Preparation Equipment

Probers

Wafer Grinders

Dicing Saws

Die Control and Cassetting Systems

Assembly and Packaging Equipment, Laser Processing

Die Bonders

Wire Bonders

Wafer Bonders

IC Pretreatment Equipment

Laser Processing Equipment

Microscopy, Optical Components

Microscopes

Optical Components

Medical Equipment

Cardiology

Reanimation and intensive care

Surgery and trauma

Physiotherapy, neurology

Molds, Linear Step Motors, Sensors

Molds

Linear Step Motors
LA Series
LH Series
LO Series
LP Series
LR Series

Step Motors, Sensors

Linear Stepping Motors LO


Technical data of the motor
Number of phases 2
Rated Current in phase winding, A 1.5; 3
Bearning type ball
Tooth pitch, mm 0.64*; 1.0*; 1.064*
Static synchronising force, N 25 ... 50
Max inductor speed, m/sec 1

Max inductor acceleration, m/sec2

10

Intrastep hysteresis, mkm 10
Repeatability, mkm 3
Cyclic error, mkm 25
Full step error, not more than 5 %

*) according to customer's requirements

Overall dimensions* and synchronising force
MODEL A, mm B, mm L**, mm FS, N
PLATEN      
LOP-60-340- 28 - 60 340 -
LOP-90-340- 28 - 90 340 -
FORCER      
LOF-25-1.5-2-BB / 70 70 - - 25
LOF-36-1.5-2-BB / 85 85 - - 36
LOF-50-1.5-2-BB / 94 94 - - 50

**) the platen(stator) lenght can be increased by a successive connection of separate modules

Connectors: D-SUB-9 Steckers
Possible fields of applications
  • Transportation systems;
  • Manipulators;
  • Robotic systems;
  • Laser technology equipment;
  • High precision multicoordinate systems

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