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Equipment for mask pattern generation and inspection

Multichannel laser generators

Pattern generators

Automatic mask inspection

Photomask inspection

Laser-based mask defect repair systems


Equipment for wafer pattern generation and inspection


Large-area steppers

Pattern generator for wafers

Mask Aligners

Inspection of wafers and substrates

Chip Preparation Equipment


Wafer Grinders

Dicing Saws

Die Control and Cassetting Systems

Assembly and Packaging Equipment, Laser Processing

Die Bonders

Wire Bonders

Wafer Bonders

IC Pretreatment Equipment

Laser Processing Equipment

Microscopy, Optical Components


Optical Components

Medical Equipment


Reanimation and intensive care

Surgery and trauma

Physiotherapy, neurology

Molds, Linear Step Motors, Sensors


Linear Step Motors
LA Series
LH Series
LO Series
LP Series
LR Series

Step Motors, Sensors

Linear Stepping Motors LH

Technical data of the motor
Number of phases 2; 4
Rated Current in phase winding, A 1.5; 3
Air pressure, MPa 0.35 0.01
Tooth pitch, mm 0.64*; 1.0*
Air gap, mkm 205
Max inductor speed, m/sec 1

Max inductor acceleration, m/sec2


Static synchronising force, N 40...180
Repeatability, mkm 3
Cyclic error, mkm 25
Intrastep hysteresis, mkm 10
Full step error, not more than 5 %

*) according to customer's requirements

Overall dimensions* and synchronising force
MODEL b, mm B, mm l, mm L, mm FS, N
LH- 40-1.5-2 / 10 40 80 43 53 40
LH-80-1.5-2 / 10 50 90 86 96 80
LH-180-1.5-2 / 30 80 130 100 130 180
Connectors: D-SUB-9 Steckers
Possible fields of applications
  • Manipulators;
  • Robotic systems;
  • Laser technology equipment;
  • High precision multicoordinate systems;
  • Systems with high dynamic technical characteristics.

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