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Equipment for mask pattern generation and inspection

Precision pattern generators

Special application pattern generator

Automatic mask inspection

Systems for inspection of work masks

Laser-based mask defect repair systems

Photorepeaters

Equipment for wafer pattern generation and inspection

Equipment for wafer projection imaging

Large-area steppers

Equipment for direct writing on wafers

Tools for proximity exposure and double-side lithography

Wafer inspection equipment

Chip Preparation Equipment

Probers

Wafer Grinders

Dicing Saws

Die Control and Cassetting Systems

Assembly and Packaging Equipment, Laser Processing

Die Bonders

Wire Bonders

Wafer Bonders

IC Pretreatment Equipment

Laser Processing Equipment

Microscopy

Microelectronics Microscopes

Material Science

Biology

Medical Equipment

Cardiology

Linear Stepping Motors LH


Technical data of the motor
Number of phases 2; 4
Rated Current in phase winding, A 1.5; 3
Air pressure, MPa 0.35 0.01
Tooth pitch, mm 0.64*; 1.0*
Air gap, mkm 205
Max inductor speed, m/sec 1

Max inductor acceleration, m/sec2

10

Static synchronising force, N 40...180
Repeatability, mkm 3
Cyclic error, mkm 25
Intrastep hysteresis, mkm 10
Full step error, not more than 5 %

*) according to customer's requirements

Overall dimensions* and synchronising force
MODEL b, mm B, mm l, mm L, mm FS, N
LH- 40-1.5-2 / 10 40 80 43 53 40
LH-80-1.5-2 / 10 50 90 86 96 80
LH-180-1.5-2 / 30 80 130 100 130 180
Connectors: D-SUB-9 Steckers
Possible fields of applications
  • Manipulators;
  • Robotic systems;
  • Laser technology equipment;
  • High precision multicoordinate systems;
  • Systems with high dynamic technical characteristics.

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