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Equipment for mask pattern generation and inspection

Multichannel laser generators

Pattern generators

Automatic mask inspection

Photomask inspection

Laser-based mask defect repair systems

Photorepeaters

Equipment for wafer pattern generation and inspection

Steppers

Large-area steppers

Pattern generator for wafers

Mask Aligners

Inspection of wafers and substrates

Chip Preparation Equipment

Probers

Wafer Grinders

Dicing Saws

Die Control and Cassetting Systems

Assembly and Packaging Equipment, Laser Processing

Die Bonders

Wire Bonders

Wafer Bonders

IC Pretreatment Equipment

Laser Processing Equipment

Microscopy, Optical Components

Microscopes

Optical Components

Medical Equipment

Cardiology

Reanimation and intensive care

Surgery and trauma

Physiotherapy, neurology

Molds, Linear Step Motors, Sensors

Molds

Linear Step Motors
LA Series
LH Series
LO Series
LP Series
LR Series

Step Motors, Sensors

Linear Stepping Motors LA


Technical data of the motor

Number of phases 2,4
Rated Current 1,5; 3 A
Max speed 1 m/sec
Repeatability 3*10-3 mm
Air gap 0,350,01 Mpa
Air split (155)*10-3 mm
Cyclic error 25*10-3 mm
Full step error 5 %
Tooth pitch 0,64*; 1,0* mm
Inter step hysteresis 10*10-3 mm

Technical data and overall dimensions

MODEL A*, mm B*, mm C*, mm L, mm FS, N
LA-350-1,5-2 / 1500 100 150 245 1500 350
LA-450-1,5-2 / 1500 150 150 245 1500 450
LA-160-1,5-2 / 700 80 80 120 700 160
LA-100-1,5-2 / 500 80 80 80 500 100

*other dimensions on customer request

Connectors: D-SUB-9 Steckers
Possible fields of applications
  • Manipulators;
  • Robotic systems;
  • Laser technology equipment;
  • High precise many coordinate systems.

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