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Equipment for mask pattern generation and inspection

Precision pattern generators

Special application pattern generator

Automatic mask inspection

Systems for inspection of work masks

Laser-based mask defect repair systems


Equipment for wafer pattern generation and inspection

Equipment for wafer projection imaging

Large-area steppers

Equipment for direct writing on wafers

Tools for proximity exposure and double-side lithography

Wafer inspection equipment

Chip Preparation Equipment


Wafer Grinders

Dicing Saws

Die Control and Cassetting Systems

Assembly and Packaging Equipment, Laser Processing

Die Bonders

Wire Bonders

Wafer Bonders

IC Pretreatment Equipment

Laser Processing Equipment


Microelectronics Microscopes

Material Science


Medical Equipment


Linear Stepping Motors LA

Technical data of the motor

Number of phases 2,4
Rated Current 1,5; 3 A
Max speed 1 m/sec
Repeatability 3*10-3 mm
Air gap 0,350,01 Mpa
Air split (155)*10-3 mm
Cyclic error 25*10-3 mm
Full step error 5 %
Tooth pitch 0,64*; 1,0* mm
Inter step hysteresis 10*10-3 mm

Technical data and overall dimensions

MODEL A*, mm B*, mm C*, mm L, mm FS, N
LA-350-1,5-2 / 1500 100 150 245 1500 350
LA-450-1,5-2 / 1500 150 150 245 1500 450
LA-160-1,5-2 / 700 80 80 120 700 160
LA-100-1,5-2 / 500 80 80 80 500 100

*other dimensions on customer request

Connectors: D-SUB-9 Steckers
Possible fields of applications
  • Manipulators;
  • Robotic systems;
  • Laser technology equipment;
  • High precise many coordinate systems.

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