Main   Site Map   Contact   Feedback   Useful Links  
About Planar Products Services R&D Support


Equipment for mask pattern generation and inspection

Multichannel laser generators

Pattern generators

Automatic mask inspection

Photomask inspection

Laser-based mask defect repair systems

Photorepeaters

Equipment for wafer pattern generation and inspection

Steppers

Large-area steppers

Pattern generator for wafers

Mask Aligners

Inspection of wafers and substrates

Chip Preparation Equipment

Probers

Wafer Grinders

Dicing Saws

Die Control and Cassetting Systems

Assembly and Packaging Equipment, Laser Processing

Die Bonders

Wire Bonders

Wafer Bonders

IC Pretreatment Equipment

Laser Processing Equipment

Microscopy, Optical Components

Microscopes

Optical Components

Medical Equipment

Cardiology

Reanimation and intensive care

Surgery and trauma

Physiotherapy, neurology

Molds, Linear Step Motors, Sensors

Molds

Linear Step Motors
LA Series
LH Series
LO Series
LP Series
LR Series

Step Motors, Sensors

Linear Step Motors


Planar Concern has been designing and manufacturing linear step motors since 1962.  The range of motors includes one-axis, two-axes, multi-axes, rotary motors, motors with feedback as well.

Advantages of linear step motors over other transmission mechanisms:

  • simple mechanical construction;
  • absence of lead screws, driving gears, etc;
  • easy to make systems with several objects moved independently in one plane
  • small overall dimensions and weight of movable parts;
  • high dynamic characteristics;
  • low noise level;
  • absence of wear of aerostatic bearings
  • high reliability;
  • environmental cleanliness;

Application:

  • Equipment for semiconductor industry (laser pattern generators, wafer steppers, inspection and measurement systems, probers, wire bonders, die bonders, etc.)
  • Equipment for electronics industry (PCB equipment, SMT equipment, laser processing equipment, visual inspection equipment, transport and handling systems, etc.)
  • Machine building, robotic engineering and other industries.

In addition to our standard models we can design and produce LSMs and LSM-based systems on customer’s requirements.

Specifications
Parameter One-Axis
LA (LO) Series
Two-Axis
LH Series
Rotary
LR Series
Maximum working field 1500 mm x 150 mm 1500 x 1000 mm Æ450 mm
maximum speed 1 m/sec 1 m/sec 1 rps
maximum acceleration 10 m/sec2 10 m/sec2 10 m/sec2
Positioning repeatability ±3 mkm ±3 mkm 0.2 arc min
Static synchronising force 450 N 110 N -
Static synchronising moment - - 2...30 N m
Gap type air (ball) bearing air air
Number of phases (2) 2; 4 2; 4 2; 4
Phase current, ±10% 1.5; 3 A 1.5; 3 A 1.5; 3 A
PRECISION STEP LINEAR DRIVE

The precision step linear drive is intended for movement of actuators, materials, components and measuring devices to the zone of technological operations in special technological equipment.

Specifications
Discreteness of movement, mm 0.002
Non- reproducibility of positioning, mm ±0.002
Maximal inductor displacement, not less than, mm:
- along X axis 295*
- along Y axis 210*
Maximal inductor speed m/s 0.8
Remote control interface RS-232 (COM port)
Software:
- DEMO- version
- DLL- library for drive control
- number of functions 10
Overall dimensions , mm
- linear step motor 640 x 426 x105
- control system 305 x 135 x 208
Mass, not more than, kg;
- linear step motor 68
- control system 5

* can be increased up to 1500 x 100mm

Manufacturer  -  Planar TM Factory for precision  engineering

COMPLETE ONE-AXIS LINEAR STEP DRIVE

The complete one-axis linear step drive was designed as a transport means for movement of actuators  materials, components and measuring devices into the zone of technological operations in special technological equipment.

SPECIFICATIONS

Discreteness of movement, mm 0,125
Maximal inductor displacement, mm up to 400 *
Maximum inductor speed m/s 0,7
Maximum inductor acceleration m/s2 0,65
Accumulated error of the inductor movement on a length of 250 mm, not more than, μm 15 μ s2
Remote control interface RS-485
Software:
- DEMO- version
- DLL- library for control of the drive
- number of functions 10
Overall dimensions, mm:
- linear step motor 500 x 88 x55
- power source 159 x 97 x38
- controller 90 x 80 x30
* can be increased up to 1500 mm
Manufacturer – Planar TM Factory for precision engineering
CONTROLLER OF A TWO-PHASE STEP DRIVE

The controller of a two-phase step drive is used for control of the one- axis two- phase step motor and for creating distributive control systems of many - axis step drives  which are used for movement of actuators, materials, components and measuring devices into the  zone of technological operations in special technological equipment.

SPECIFICATIONS

Series connection interface RS-485 (mono-channel)
External connector type for connection of:
- motor phases 4 terminals of the WAGO 236-102 type
- power supply 4 terminals of the WAGO 236-102 type
- interface of remote control signals plug of the SNP101-98VP type
Maximal frequency of motor phase commutation, kHz 10
Motor phase commutation type 8 beat (half step)
Rated phase current, A 1...3 (per order)
Rated voltage of power supply, V 16....40
Protection of the phase outputs from the load short circuit available
Protection from an incorrect polarity connection of power supply available
Option of diminishing the phase current value in the standby mode available
Overall dimensions, mm 90 x80 x 30
Manufacturer – Planar TM Factory for precision engineering
PULSE CURRENT SHAPER OF THE TWO-PHASE DRIVE

The pulse current shaper of the two- phase drive is intended for creation of control systems for two- phase step motors as an output stage.

SPECIFICATIONS

Number of phases 2
Rated phase current, A 1.5
Rated voltage of power supply, V 16...48
Number of analog inputs 4
Number of discrete inputs 8
Number of discrete outputs 8
Word size of the quadrature sensor, bit 24
Overall dimensions, mm 205 x 122 x 25
Manufacturer – Planar TM Factory for precision engineering

Russian version
PLANAR
Planar Corporation
Site Search
 

© 2003 Planar
e-mail: planar@solo.by

www.redgraphic.com Web design and
development