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Equipment for mask pattern generation and inspection

Precision pattern generators

Special application pattern generator

Automatic mask inspection

Systems for inspection of work masks

Laser-based mask defect repair systems


Equipment for wafer pattern generation and inspection

Equipment for wafer projection imaging

Large-area steppers

Equipment for direct writing on wafers

Tools for proximity exposure and double-side lithography

Wafer inspection equipment

Chip Preparation Equipment


Wafer Grinders

Dicing Saws

Die Control and Cassetting Systems

Assembly and Packaging Equipment, Laser Processing

Die Bonders

Wire Bonders

Wafer Bonders

IC Pretreatment Equipment

Laser Processing Equipment


Microelectronics Microscopes

Material Science


Medical Equipment



English MainProducts › Microscopy


Planar began to develop and produce visual observation devices, mainly microscopes and optical projectors in 1964. In 1966 we started production of microscopes and projectors for mask aligners and in 1969 these mask aligners were equipped with two-field microscopes developed by Planar. More than 2,000 pieces of this kind of equipment were produced in the 1970s.
In 1976 Planar started serial production of a series of projectors for assembly operations (PN-80 Series) and in 1982 introduced a high-resolution projector with a raster screen (MPV Model).
In 1983 we began production of defect inspection microscopes (MKD Series) and in 1988 - inspection microscopes for various applications with magnification of 1000 (MKI 2 Series).
At present Planar Concern offers a great variety of microscopes for electronic industry, scientific researches in metallography, medicine and biology.

Microelectronics Microscopes
Material Science

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