Equipment for wafer pattern generation and inspection
The equipment for wafer patterning is crucial for mass production. High efficiency and high reproduction accuracy of process parameters are the most important parameter of such equipment. This equipment is unattended, upgraded by computer vision, with modern software, reprogrammable load devices.
KBTEM-OMO has a great experience in development of such equipment. History of the equipment development for wafer patterning and inspection at our enterprise is presented in historical retrospection.